JPS5472477U - - Google Patents

Info

Publication number
JPS5472477U
JPS5472477U JP14663577U JP14663577U JPS5472477U JP S5472477 U JPS5472477 U JP S5472477U JP 14663577 U JP14663577 U JP 14663577U JP 14663577 U JP14663577 U JP 14663577U JP S5472477 U JPS5472477 U JP S5472477U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14663577U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14663577U priority Critical patent/JPS5472477U/ja
Publication of JPS5472477U publication Critical patent/JPS5472477U/ja
Pending legal-status Critical Current

Links

JP14663577U 1977-10-31 1977-10-31 Pending JPS5472477U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14663577U JPS5472477U (en]) 1977-10-31 1977-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14663577U JPS5472477U (en]) 1977-10-31 1977-10-31

Publications (1)

Publication Number Publication Date
JPS5472477U true JPS5472477U (en]) 1979-05-23

Family

ID=29127327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14663577U Pending JPS5472477U (en]) 1977-10-31 1977-10-31

Country Status (1)

Country Link
JP (1) JPS5472477U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013738U (ja) * 1983-07-06 1985-01-30 東芝機械株式会社 ウエハカセツト

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426666A (en) * 1977-07-29 1979-02-28 Sanyo Electric Co Ltd Positioning method of semiconductor wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426666A (en) * 1977-07-29 1979-02-28 Sanyo Electric Co Ltd Positioning method of semiconductor wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013738U (ja) * 1983-07-06 1985-01-30 東芝機械株式会社 ウエハカセツト

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